用途
各类槽式清洗设备Wet Bench
各类单片式刻蚀&清洗设备Single Wafer
化学供应系统(Chemical Supply System)局部化学供应系统(Local Chemical Supply Unit)
中央化学供应系统(Central Chemical Supply System (for Whole Fab.))
化学混合系统(Chemical Mixing System)
规格
Pr-stripper/Wet Etch/Wafer clean/EKC/Part's clean/Tube clean