Earthquake protective system widely used for vertical furnaces, stocker and other equipment and facillity. Customized solution is also available to meet requirement in various manufacturing equipment, including front end fab, bumping, advanced packaging, etc

Minimized displacement to save cost and clean room floor. It is achieved by special design and no extra damper is needed.  

Acceleration is greatly reduced to minimize/elimiate the damage by earthquake (wafer slip, breakage, etc).