用途
各類槽式清洗設備Wet Bench
各類單片式刻蝕&清洗設備Single Wafer
化學供應系統(Chemical Supply System)局部化學供應系統(Local Chemical Supply Unit)
中央化學供應系統(Central Chemical Supply System (for Whole Fab.))
化學混合系統(Chemical Mixing System)
規格
Pr-stripper/Wet Etch/Wafer clean/EKC/Part's clean/Tube clean