WM-Seriies

• Can detect any type of micro defects on non-patterned wafer of semiconductor device
• Avilable for wide-range wafer size from 6-inch to 8-inch or from 8-inch to 12-inch

Wafer Surface Analyzer

• Provied the best solution for 65-90nm process node
• World's first wafer surface analyzer using the violet-LD
• Drastic reduction of the running cost by using the violet-LD
• Low price / High performance / Small foot print / Easy operation
• This product is equipped with bule-violet semiconductor laser
• This prduct is high quality high speed measuring and low-priced. 

WM--Seriies for 6 ~ 12inch wafer inspection