Fully automatic inspeciton of pinholes, through holes and surface defect for semiconductor prime wafers

Nexus1 has good market share and widely used in high volume production in global install base. It can be used for both light and heavy doped wafers with high throughput.  

AWI-12 for 12" (300mm) prime wafer inspection

AWI-8 for 8" (200mm) prime wafer inspection