Intellisys Pressure Control Components Intellisys adaptive pressure controllers and throttle valves reduce time to pressure setpoint, while increasing tool throughput with over 100,000 control resolution steps and a 20 times valve speed increase. Sealing and non-sealing butterfly valves are available with or without on-board control. Throttling pendulum valves and SoftShut linear gate valves provide unequalled pressure control as well as isolation for large bore high vacuum pumps. Heated and unheated capacitance diaphragm gauges and heater jackets are available as options

Vacuum process tool throughput and yield rates can be significantly affected by the performance level of chamber pressure control. Faster step transitions and more precise pressure control are often desired or needed to enhance tool productivity or increase production yields. The Intellisys technology revolves around a new method of operating a variety of stepper motor driven downstream control valves (such as butterfly, poppet, gate and pendulum). In essence, it combines closed loop stepper motor control with an advanced pressure control algorithm allowing such valves to be controlled in ways never before possible. As a result of the exceptionally fast valve actuation and ultra-high position resolution, throughput increases up to 15% coupled with significant yield improvements and 100-fold scrap reduction have been realized saving vacuum processors millions of dollars per year.