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Forline Trap


Applications

Since 1962, Nor-Cal Products has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from the sealed coaxial traps, which prevent oil backstreaming, to the triplepass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. Often times our customers see a 200% increase in preventative maintenance intervals after installing one of these traps.


Features

Comprehensive Downstream Solutions Our experience coupled with a broad product offering allows us to integrate components, providing comprehensive solutions to semiconductor fabs and equipment manufacturers. To improve overall system performance and achieve customer defined goals, a thorough evaluation of the system is conducted.

A detailed worksheet is posted on our website for you to download. Answer these questions before calling your Nor-Cal representative. This worksheet will greatly assist us in calculating your cost of ownership model. A cost of ownership model can show payback as a result of increased tool utilization and decreased planned and unplanned maintenance costs.


Specification

Metal Sieve Traps
Molecular Sieve Traps
Particulate Traps 
LPCVD-TEOS Traps 
Liquid Nitrogen Traps
Water Cooled Traps
Oil Mist Eliminators
Filters, Hardware & Accessories   

 


Keyword

Trap, Forline Trap, 前置捕捉器