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UHV Vacuum Gate Valve


Applications

This high vacuum gate valve, apply on industry of Semi-conductor, FPD, PV, LED.

Installing between Chambers or between Atmosphere and Chambers, be the transportation port.

       

Features

 
● L motion, No metal contact sliding part within vacuum and particle free.
 
● Simple and minimum BOM configuration enables compact and space-saving product
 
● Vertical Gate sealing surface minimizes risk of foreign object contamination
 
● Standard specification is high-robustness and maintenance-free product with 1 million cycles life time
 
● Standard gate seal elastomer is O-ring, which enables lifetime cost-saving
 

Specification

Transfer vacuum Valves has various types are available depending on valve size and specifications
V TEX will propose actuating type which is the most suitable for required specification
 
<< Valve Actuator type >>
  • RollCam Type
  • Twin-RollCam Type
  • Multi-rollcam Type
  • Boxer Type
  • Roll-to-Roll Process type

<< MODEL vs. PRESSURE >>

  • ATM Pressure model (ATM/Loadlock type):

                   ATM vs. ATM

  • Positive Pressure model (Positive Pressure type):

                     ATM vs. Vacuum                                Vacuum vs. Vacuum

   

  • Back Pressure model (Back Pressure type):

            Vacuum vs. ATM                           Vacuum vs. Vacuum                    

  

            ATM vs. Vacuum

Keyword

高真空閥門, 高真空傳輸閘閥, 矩形閘閥, 插板閥, 檔板閥, L -MOTION, Particle Free, HV UHV vacuum gate gate valve, Slit Valve, Door Valve, Gate Valve, Rectangle Gate Valve, Roll-cam gate valve